Chancellor’s Professor Marc J. Madou Updates MEMS Textbook

Fundamentals of Microfabrication and Nanotechnology in Third Edition

Chancellor’s Professor Marc J. Madou, Ph.D., Department of Mechanical and Aerospace Engineering, with joint appointments in the Department Biomedical Engineering and the Department of Chemical Engineering and Materials Science, has published the third edition of his three-volume textbook Fundamentals of Microfabrication and Nanotechnology.

The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume, an expanded version of the prior edition, presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes and additive technologies. The third volume focuses on manufacturing techniques and applications of biological micro-electro-mechanical systems(Bio-MEMS) and biological nano-electro-mechanical systems(Bio-NEMS).

“I feel the United States is facing a tremendous problem in loss of manufacturing,” Madou states. “So, in this rewrite, I want more people to see that MEMS and NEMS should be seen as an opportunity to manufacture things and help the U.S retain a manufacturing edge longer than we have for other technologies in the past.  In this country, we say we’ll design and market products, but I think if we don’t know the latest manufacturing tricks, we can’t properly design the next generation of products. So, a loss of manufacturing is something that may lead to the loss of even the ability to design new products.”

The textbook features recent developments in nano- and micromanufacturing techniques, DNA and protein arrays, fluidics, photonics and actuators. It provides a theoretical foundation for understanding the science behind MEMS and NEMS and explores the latest manufacturing techniques, including rapid prototyping and a wide variety of novel nanomanufacturing approaches.

“There are two main drives for this book,” says Madou. “One is to explore deeper into the theory of MEMS and NEMS, so it can become an independent discipline that will stand on its own, apart from integrated circuits. The second is to make a deeper connection between design, theory and manufacturing.”